Silicide formation in cobalt/amorphous silicon, amorphous …
For amorphous cobalt-silicon and bias-induced cobalt-silicon films, Co 2 Si forms as a firstsilicide phase, followed by the formation of CoSi and CoSi 2. For a Co/a-Si multilayer film with the atomic concentration ratio of the cobalt to silicon layer being 1:2, CoSi is found to be formed as the first silicide phase.